DC Field | Value | Language |
---|---|---|
dc.contributor.author | Moon, SY | ko |
dc.contributor.author | Rhee, JK | ko |
dc.contributor.author | Kim, DB | ko |
dc.contributor.author | Choe, Wonho | ko |
dc.date.accessioned | 2007-07-16T02:29:55Z | - |
dc.date.available | 2007-07-16T02:29:55Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-03 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v.13, pp.65 - 70 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | http://hdl.handle.net/10203/846 | - |
dc.description.abstract | Discharge modes, alpha and gamma, of a radio-frequency helium capacitively coupled discharge at atmospheric pressure were investigated with the discharge gap distance between electrodes varied from 1 to 5 mm. As similarly observed in other experiments, the alpha and gamma mode and the alpha-gamma mode transition were observed with large drops in the voltage (310-179 V) and the phase angle between the voltage and current (54 degrees-18 degrees), and a contraction of the plasma volume (8.5-0.17 cm(3), at 3 mm gap distance). The discharge voltage where the alpha-gamma mode transition occurred versus the gap distance showed a similar behavior with the Paschen curve for a gas breakdown. Depending on the gap distance, normal and abnormal glow regimes were observed in the alpha mode. At 1 and 2 mm, the alpha mode remained in the abnormal glow discharge until the alpha-gamma mode transition occurred as the discharge current increases. At 3 mm, however, the alpha mode was excited as a normal glow discharge with a constant current density (17 mA/cm(2)) but it became an abnormal glow discharge as the current increased. At 4 mm, the alpha mode was sustained as a normal glow discharge, then the transition to the gamma mode occurred. Using a simple resistor-capacitor circuit model and a alpha sheath breakdown model, the discharge modes and the mode transition properties were studied. (c) 2006 American Institute of Physics. | - |
dc.description.sponsorship | SAMSUNG SDI. Co., Ltd. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | ARGON DISCHARGE | - |
dc.subject | PLASMA SOURCE | - |
dc.subject | RF | - |
dc.title | alpha, gamma, and normal, abnormal glow discharge modes in radio-frequency capacitively coupled discharges at atmospheric pressure | - |
dc.type | Article | - |
dc.identifier.wosid | 000236463000046 | - |
dc.identifier.scopusid | 2-s2.0-33645670570 | - |
dc.type.rims | ART | - |
dc.citation.volume | 13 | - |
dc.citation.beginningpage | 65 | - |
dc.citation.endingpage | 70 | - |
dc.citation.publicationname | PHYSICS OF PLASMAS | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Choe, Wonho | - |
dc.contributor.nonIdAuthor | Moon, SY | - |
dc.contributor.nonIdAuthor | Rhee, JK | - |
dc.contributor.nonIdAuthor | Kim, DB | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | ARGON DISCHARGE | - |
dc.subject.keywordPlus | PLASMA SOURCE | - |
dc.subject.keywordPlus | RF | - |
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