Parametric study of atmospheric pressure microwave-induced Ar/O-2 plasmas and the ambient air effect on the plasma

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A torch type microwave-induced afterglow plasma was produced at atmospheric pressure using an open-ended fused silica concentric double tube assisted by Ar and O-2 supply gases. The plasma emerged from the end of the discharge tube and was exposed to ambient air. A parametric study of the plasma characteristics was performed by measuring the temperature, density, and plasma volume as the operational parameters such as microwave power, gas flow rate, and its composition were varied. The excitation temperature (T-exc) obtained from the Ar I emission spectrum ranged from 3010 to 4350 K and the rotational temperature (T-rot) measured from the OH and O-2 diatomic molecular spectra ranged from 2250 to 3550 K. The electron density (n(e)) from the H-beta Stark broadening width at the plasma core was in the range of 6.6 to 7.6x10(14) cm(-3). The two-dimensional distribution of T-exc and T-rot was also obtained. Experiments while varying the Ar and O-2 gas flow rate and the O-2/Ar ratio showed that n(e) was reduced but T-exc was increased as the O-2 flow rate was increased. Using an additional dielectric tube for shielding the plasma from the ambient air demonstrated a significantly enlarged plasma length and lower T-rot due to the nitrogen entrainment, as compared to the unshielded case. (c) 2006 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2006-10
Language
English
Article Type
Article
Keywords

DISCHARGE; ABATEMENT; OH

Citation

PHYSICS OF PLASMAS, v.13, pp.570 - 574

ISSN
1070-664X
DOI
10.1063/1.2357722
URI
http://hdl.handle.net/10203/844
Appears in Collection
NE-Journal Papers(저널논문)
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