DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한기호 | ko |
dc.contributor.author | 조영호 | ko |
dc.date.accessioned | 2013-03-04T22:20:45Z | - |
dc.date.available | 2013-03-04T22:20:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-01 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.28, no.1, pp.1 - 10 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/84396 | - |
dc.description.abstract | This paper presents a navigation garde capacitive microaccelerometer, whose low-noise high-resolution detection capability is achieved by a new electrode design based on a high-amplitude anti-phase sense voltage. We reduce the mechanical noise of the microaccelerometer to the level of 5.5㎍/(equation omitted) by increasing the proof-mass based on deep RIE process of an SOI wafer. We reduce the electrical noise as low as 0.6㎍/(equation omitted) by using an anti-phase high-amplitude square-wave sense voltage of 19V. The nonlinearity problem caused by the high-amplitude sense voltage is solved by a new electrode design of branched finger type. Combined use of the branched finger electrode and high-amplitude sense voltage generates self force-balancing effects, resulting in an 140% increase of the bandwidth from 726㎐ to 1,734㎐. For a fixed sense voltage of 10V, the total noise is measured as 2.6㎍/(equation omitted) at the air pressure of 3.9torr, which is the 51% of the total noise of 5.1㎍/(equation omitted) at the atmospheric pressure. From the excitation test using 1g, 10㎐ sinusoidal acceleration, the signal-to-noise ratio of the fabricated microaccelerometer is measured as 105㏈, which is equivalent to the noise level of 5.7㎍/(equation omitted). The sensitivity and linearity of the branched finger capacitive microaccelerometer are measured as 0.638V/g and 0.044%, respectively. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 고감지전압 및 가지전극을 이용한 고정도 정전용량형 미소가속도계 | - |
dc.title.alternative | High-resolution Capacitive Microaccelerometers using Branched Finger Electrodes with High-Amplitude Sense Voltage | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 28 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 1 | - |
dc.citation.endingpage | 10 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.contributor.localauthor | 조영호 | - |
dc.contributor.nonIdAuthor | 한기호 | - |
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