간섭무늬 최대점 이동량의 감지를 이용한 초정밀 변위 측정 시스템Ultra Precision Displacement Measuring System Using the Detection of Fringe Peak Movement

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This paper proposes a precision displacement measuring method of detecting fringe movement of interferograms with a nanometric resolution. It is well known that the laser interferometer plays a useful and essential role in scientific and industrial application, but they have such error sources as an unequal gain of detectors, imbalanced beams, and lack of quadrature. These error sources degrade the accuracy of the interferometer. However, the fringe movement of interferograms has little relation with these error sources. In order to investigate performance of the proposed method. analysis and simulation were executed over random noise and wavefront distorion. Results of the simulation show that the proposed method is robust against these errors. Experiment was implemented to verify this method.
Publisher
한국정밀공학회
Issue Date
2001-06
Language
Korean
Citation

한국정밀공학회지, v.18, no.6, pp.80 - 86

ISSN
1225-9071
URI
http://hdl.handle.net/10203/84366
Appears in Collection
ME-Journal Papers(저널논문)
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