방사형 자기장 내의 전기도금된 평면코일을 이용한 전자기형 마이크로 액추에이터

Abstract

This paper presents an electromagnetic microactuator using the copper coil electroplated on the p+silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial direction, we propose a new actuator structure with twin magnets. The microactuator field in the radial direction, we propose a new actuator structure with twin magnets. The microactator shows a values of resonant frequency and quality factor in the ranges of 10.51±0.22kHz and 46.6±3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4μm for the AC rms current of 26.8mA, showing 2.4 times larger amplitude than the single magnet microactuator.