저온 비등 팽창유체와 고점성 유체마개를 이용한 고출력 저전력형 마이크로 분사기

Abstract

A high-impulse, low-power, digital microthruster has been developed using low-boiling-temperature liquid propellant with high-viscosity fluid plug. The viscous fiction force of the fluid plug increases the blast pressure and the low-boiling-temperature liquid propellant is intended to reduce input power consumption. The three-layer microthruster has been fabricated by surface micromachining as well as bulk micromachining in the size of 7x13x1.5㎣. A digital output impulse bit of 6.4x10-8 Nsec has been obtained from the fabricated microthruster using perfluoro normal hexane (FC72) propellant and oil plug, resulting in about ten times increase of the impulse bit using one hundredth electrical input energy compared to the conventional multiple-shot microthruster.