DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, KB | ko |
dc.contributor.author | Cho, Young-Ho | ko |
dc.date.accessioned | 2013-03-04T22:08:01Z | - |
dc.date.available | 2013-03-04T22:08:01Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001-03 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.10, no.1, pp.128 - 136 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/84346 | - |
dc.description.abstract | We present a new electrostatic actuation method using a lateral repulsive-force induced by an asymmetric distribution of planar electrostatic field. The lateral repulsive-force has been characterized by a simple analytical equation, derived from a finite element simulation. Quality-factors are estimated from the computer simulation based on creep flow model. A set of repulsive-force polycrystalline silicon microactuators has been designed and fabricated by a four-mask surface-micromachining process. Static and dynamic response of the fabricated microactuators has been measured at the atmospheric pressure for the driving voltage range of 0-140 V. The static displacement of 1.27 Irm is obtained at the de voltage of 140 V. The resonant frequency of the repulsive-force microactuator increases from 11.7 kHz to 12.7 kHz when the de induction voltage increases from 60 V to 140 V. The measured quality-factors are increased from 12 to 13 in the voltage range of 60-140 V. Fundamental characteristics of the force, frequency and quality-factor of the electrostatic repulsive-force microactuator have been discussed and compared with those of the conventional electrostatic attractive-force microactuator. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | MICROSTRUCTURES | - |
dc.title | Laterally driven electrostatic repulsive-force microactuators using asymmetric field distribution | - |
dc.type | Article | - |
dc.identifier.wosid | 000167502000021 | - |
dc.identifier.scopusid | 2-s2.0-0035276044 | - |
dc.type.rims | ART | - |
dc.citation.volume | 10 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 128 | - |
dc.citation.endingpage | 136 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Lee, KB | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | creeping flow | - |
dc.subject.keywordAuthor | electrostatic force | - |
dc.subject.keywordAuthor | frequency-tuning | - |
dc.subject.keywordAuthor | microresonator | - |
dc.subject.keywordAuthor | quality-factor | - |
dc.subject.keywordAuthor | repulsive-force | - |
dc.subject.keywordPlus | MICROSTRUCTURES | - |
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