비등간격 수평감지 전극구조의 정전용량형 다결정 실리콘 가속도계A Polysilicon Capacitive Microaccelerometer with Unevenly Distributed Comb Electrodes

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 440
  • Download : 0
DC FieldValueLanguage
dc.contributor.author한기호ko
dc.contributor.author조영호ko
dc.date.accessioned2013-03-04T22:07:51Z-
dc.date.available2013-03-04T22:07:51Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-07-
dc.identifier.citation전기학회논문지, v.50, no.7, pp.346 - 350-
dc.identifier.issn1975-8359-
dc.identifier.urihttp://hdl.handle.net/10203/84345-
dc.description.abstractWe present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.-
dc.languageKorean-
dc.publisher대한전기학회-
dc.title비등간격 수평감지 전극구조의 정전용량형 다결정 실리콘 가속도계-
dc.title.alternativeA Polysilicon Capacitive Microaccelerometer with Unevenly Distributed Comb Electrodes-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume50-
dc.citation.issue7-
dc.citation.beginningpage346-
dc.citation.endingpage350-
dc.citation.publicationname전기학회논문지-
dc.contributor.localauthor조영호-
dc.contributor.nonIdAuthor한기호-
Appears in Collection
BiS-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0