Electron temperature analysis of two-gas-species inductively coupled plasma

Abstract

The electron energy distribution functions and electron temperatures are measured in Ar/He and Ar/Xe inductively coupled plasma with various mixing ratios. The electron temperature does not change linearly with the mixing ratios; instead it increases abruptly near P-He/PAr+He=1 and decreases rapidly near P-Xe/PAr+Xe=0. A simple model using a two-ion-species fluid model is suggested to explain the electron temperature variations, and it agrees well with the experimental results. (C) 2001 American Institute of Physics.