Nanoscale structure formation on sputter eroded surface

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We investigate the morphological features of sputter eroded surfaces, demonstrating that while at short times ripple formation is described by the linear theory, after a characteristic time, the nonlinear terms determine the surface morphology, by monitoring the surface width and the erosion velocity. Furthermore, we show that sputtering under normal incidence leads to the formation of spatially ordered uniform nanoscale islands or holes. We find that while the size of these nanostructures is independent of flux and temperature, it can be controlled by ion beam energy.
Publisher
KOREAN PHYSICAL SOC
Issue Date
2001-09
Language
English
Article Type
Article; Proceedings Paper
Keywords

ION-BOMBARDED SI(001); ROUGHENING INSTABILITY; RIPPLE FORMATION; EROSION; EVOLUTION

Citation

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.39, no.3, pp.421 - 424

ISSN
0374-4884
URI
http://hdl.handle.net/10203/84009
Appears in Collection
PH-Journal Papers(저널논문)
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