Study of geometrical and operational parameters controlling the micro jet atmospheric pressure plasma characteristics

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Controllability of small size atmospheric pressure plasma generated at low frequency in a pin to dielectric plane electrode configuration was studied. It was shown that the plasma characteristics could be controlled by geometrical and operational parameters of the experiment. Under most circumstances, continuous glow discharges were observed, but both the corona and/or the dielectric barrier discharge characteristics were observed depending on the position of the pin electrode. The plasma size and the rotational temperature were also varied by the parameters. The rotational temperature was between 300 and 490 K, being low enough to treat thermally sensitive materials.
Publisher
AIP
Issue Date
2006-08-10
Keywords

plasma jets; plasma sources; glow discharge; corona; plasma temperature; plasma diagnostics; plasma materials processing

Citation

Appl. Phys. Lett. 89, pp.061502-1 - 061502-2

ISSN
0003-6951
URI
http://hdl.handle.net/10203/833
Appears in Collection
PH-Journal Papers(저널논문)

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