DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, SH | ko |
dc.contributor.author | Lim, TW | ko |
dc.contributor.author | Yang, Dong-Yol | ko |
dc.contributor.author | Kong, Hong-Jin | ko |
dc.contributor.author | Lee, KS | ko |
dc.date.accessioned | 2013-03-04T16:29:55Z | - |
dc.date.available | 2013-03-04T16:29:55Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-07 | - |
dc.identifier.citation | POLYMER-KOREA, v.28, pp.305 - 313 | - |
dc.identifier.issn | 0379-153X | - |
dc.identifier.uri | http://hdl.handle.net/10203/83275 | - |
dc.description.abstract | A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200 nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30 nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications. | - |
dc.language | English | - |
dc.publisher | POLYMER SOC KOREA | - |
dc.subject | 3-DIMENSIONAL MICROFABRICATION | - |
dc.subject | LASER NANOFABRICATION | - |
dc.subject | PHOTOPOLYMERIZATION | - |
dc.subject | MICROMACHINES | - |
dc.title | Fabrication process of a nano-precision polydimethylsiloxane replica using vacuum pressure-difference technique | - |
dc.type | Article | - |
dc.identifier.wosid | 000223141200004 | - |
dc.identifier.scopusid | 2-s2.0-24344450714 | - |
dc.type.rims | ART | - |
dc.citation.volume | 28 | - |
dc.citation.beginningpage | 305 | - |
dc.citation.endingpage | 313 | - |
dc.citation.publicationname | POLYMER-KOREA | - |
dc.contributor.localauthor | Yang, Dong-Yol | - |
dc.contributor.localauthor | Kong, Hong-Jin | - |
dc.contributor.nonIdAuthor | Park, SH | - |
dc.contributor.nonIdAuthor | Lim, TW | - |
dc.contributor.nonIdAuthor | Lee, KS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | nano-replication printing | - |
dc.subject.keywordAuthor | vacuum pressure-difference technique | - |
dc.subject.keywordAuthor | two-photon polymerization | - |
dc.subject.keywordAuthor | femto-second laser | - |
dc.subject.keywordAuthor | polydimethylsiloxane molding | - |
dc.subject.keywordPlus | 3-DIMENSIONAL MICROFABRICATION | - |
dc.subject.keywordPlus | LASER NANOFABRICATION | - |
dc.subject.keywordPlus | PHOTOPOLYMERIZATION | - |
dc.subject.keywordPlus | MICROMACHINES | - |
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