인덕턴스형 미소 변위 측정 시스템과 응답 특성의 분석An Inductive Micro Position Sensign System and Analysis of its Response Characteristics

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This paper presents a mew design of an inductive position sensing system with high sensitivity. The designed system consists of the driving coils, position-detecting coils, and closed loop formed magnetic blocks. To obtain high sensitivity we design a symmetric and closed loop type measuring system with small air-gaps. The elements that affect the system characteristics are turn ratio, excitation frequency, air-gap size, capacitance effect, and load resistance. By experimental investigation, the influences of these elements are examined and the system parameters are selected. The sensitivity of the newly designed system is greater than 2800mV/(V mm) and the linearity error is below${\pm}0.01%; in; the; range; of; {\pm}200{\mu}m$.
Publisher
한국정밀공학회
Issue Date
2001-03
Language
Korean
Citation

한국정밀공학회지, v.18, no.3, pp.189 - 194

ISSN
1225-9071
URI
http://hdl.handle.net/10203/83165
Appears in Collection
ME-Journal Papers(저널논문)
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