Quantum dot and hole formation in sputter erosion

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Recently, it was experimentally demonstrated that sputtering under normal incidence leads to the formation of spatially ordered uniform nanoscale islands or holes. Here, we show that these nanostructures have inherently nonlinear origin, first appearing when the nonlinear terms start to dominate the surface dynamics. Depending on the sign of the nonlinear terms, determined by the shape of the collision cascade, the surface can develop regular islands or holes with identical dynamical features, and while the size of these nanostructures is independent of flux and temperature, it can be modified by tuning the ion energy. (C) 2001 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2001-02
Language
English
Article Type
Article
Keywords

RIPPLE FORMATION; SURFACE-DIFFUSION; ION-BOMBARDMENT; SCALE

Citation

APPLIED PHYSICS LETTERS, v.78, no.6, pp.805 - 807

ISSN
0003-6951
DOI
10.1063/1.1343468
URI
http://hdl.handle.net/10203/82004
Appears in Collection
PH-Journal Papers(저널논문)
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