DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이기방 | ko |
dc.contributor.author | 서영호 | ko |
dc.contributor.author | 조영호 | ko |
dc.date.accessioned | 2013-03-04T03:50:18Z | - |
dc.date.available | 2013-03-04T03:50:18Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-08 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.27, no.8, pp.1259 - 1265 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/81803 | - |
dc.description.abstract | We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 계단식 정전빗살구조물을 이용한 수평구동형 미소공진기의 주파수 조정 | - |
dc.title.alternative | Tuning of a Laterally Driven Microresonator using Electrostatic Comb Step Array | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 1259 | - |
dc.citation.endingpage | 1265 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.identifier.kciid | ART000911937 | - |
dc.contributor.localauthor | 조영호 | - |
dc.contributor.nonIdAuthor | 이기방 | - |
dc.contributor.nonIdAuthor | 서영호 | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.