Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry
We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range. (C) 2003 Optical Society of America.
- Publisher
- OPTICAL SOC AMER
- Issue Date
- 2003-06
- Language
- English
- Article Type
- Article
- Keywords
POLARIZATION
- Citation
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, v.20, pp.1060 - 1066
- ISSN
- 1084-7529
- Appears in Collection
- EE-Journal Papers(저널논문)
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