DC Field | Value | Language |
---|---|---|
dc.contributor.author | You, SJ | ko |
dc.contributor.author | Kim, HC | ko |
dc.contributor.author | Chung, CW | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.contributor.author | Lee, JK | ko |
dc.date.accessioned | 2013-03-03T23:54:00Z | - |
dc.date.available | 2013-03-03T23:54:00Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-12 | - |
dc.identifier.citation | JOURNAL OF APPLIED PHYSICS, v.94, pp.7422 - 7426 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | http://hdl.handle.net/10203/80966 | - |
dc.description.abstract | We measured electrical characteristics of capacitively coupled plasma at low pressure (2.67 Pa) with different driving frequencies. From these measurements, we observed a significant change in discharge power characteristics during the frequency increase. While increasing the frequency, a square dependence of power characteristics (Psimilar toI(2)) changes to a linear dependence (Psimilar toI). This observed result reflects that a power dissipation mode transition from an ion-dominated dissipation mode to an electron-dominated dissipation mode takes place during the driving frequency increase. Both the results calculated from a simple sheath model and a particle-in-cell simulation are in a good agreement with the experimental data. (C) 2003 American Institute of Physics. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | MAGNETIC-FIELD | - |
dc.subject | RF DISCHARGES | - |
dc.subject | ELECTRODE SHEATHS | - |
dc.title | Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma | - |
dc.type | Article | - |
dc.identifier.wosid | 000186969900005 | - |
dc.identifier.scopusid | 2-s2.0-0346935299 | - |
dc.type.rims | ART | - |
dc.citation.volume | 94 | - |
dc.citation.beginningpage | 7422 | - |
dc.citation.endingpage | 7426 | - |
dc.citation.publicationname | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | You, SJ | - |
dc.contributor.nonIdAuthor | Kim, HC | - |
dc.contributor.nonIdAuthor | Chung, CW | - |
dc.contributor.nonIdAuthor | Lee, JK | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | MAGNETIC-FIELD | - |
dc.subject.keywordPlus | RF DISCHARGES | - |
dc.subject.keywordPlus | ELECTRODE SHEATHS | - |
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