단축 인장에 의한 SU-8박막의 기계적 물성 측정Measurement of mechanical properties of SU-8 thin film
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백동천 | ko |
| dc.contributor.author | 박태상 | ko |
| dc.contributor.author | 이순복 | ko |
| dc.contributor.author | 이낙규 | ko |
| dc.date.accessioned | 2013-03-03T22:56:47Z | - |
| dc.date.available | 2013-03-03T22:56:47Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.citation | 반도체디스플레이기술학회지, v.3, no.2, pp.23 - 26 | - |
| dc.identifier.issn | 1738-2270 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/80816 | - |
| dc.description.abstract | Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement. | - |
| dc.language | Korean | - |
| dc.publisher | 한국반도체디스플레이기술학회 | - |
| dc.title | 단축 인장에 의한 SU-8박막의 기계적 물성 측정 | - |
| dc.title.alternative | Measurement of mechanical properties of SU-8 thin film | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 3 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 23 | - |
| dc.citation.endingpage | 26 | - |
| dc.citation.publicationname | 반도체디스플레이기술학회지 | - |
| dc.contributor.localauthor | 이순복 | - |
| dc.contributor.nonIdAuthor | 백동천 | - |
| dc.contributor.nonIdAuthor | 박태상 | - |
| dc.contributor.nonIdAuthor | 이낙규 | - |
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