Electron cyclotron resonance in a weakly magnetized radio-frequency inductive discharge

Abstract

The evolution of the electron energy distribution function (EEDF) over a weak magnetic field range is investigated in magnetized radio-frequency (rf) inductive discharges under a collisionless regime where an anomalous skin effect and electron cyclotron resonance (ECR) can occur. A significant change in the low-energy range of the EEDF is found in the ECR condition during the evolution. The observed result reveals the low-energy electrons are efficiently heated by the rf ECR in the presence of the anomalous skin effect. The calculated result of the electron distribution based on kinetic theory is in good agreement with the experiment.