수평구동형 정전 액추에이터를 이용한 극소형 공진가속도계의 설계,제작,정적시험 및 오차분석

Abstract

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sized of the accelerometer are designed for the sensitivity of 103Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of resonant accelerometers has been fabricated by the combined use of bulk-mass deflection of 4.3±0.5μm; thereby resulting in the detection sensitivity of 1.10×103Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.