DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim B.-C. | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.date.accessioned | 2013-03-03T15:48:38Z | - |
dc.date.available | 2013-03-03T15:48:38Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-04 | - |
dc.identifier.citation | OPTICS LETTERS, v.28, no.7, pp.528 - 530 | - |
dc.identifier.issn | 0146-9592 | - |
dc.identifier.uri | http://hdl.handle.net/10203/79304 | - |
dc.description.abstract | We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers. (C) 2003 Optical Society of America. | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.title | Absolute interferometer for three-dimensional profile measurement of rough surfaces | - |
dc.type | Article | - |
dc.identifier.wosid | 000181680000010 | - |
dc.identifier.scopusid | 2-s2.0-0038678153 | - |
dc.type.rims | ART | - |
dc.citation.volume | 28 | - |
dc.citation.issue | 7 | - |
dc.citation.beginningpage | 528 | - |
dc.citation.endingpage | 530 | - |
dc.citation.publicationname | OPTICS LETTERS | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Kim B.-C. | - |
dc.type.journalArticle | Article | - |
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