| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choe, HH | ko |
| dc.contributor.author | Yoon, NS | ko |
| dc.contributor.author | Kim, SS | ko |
| dc.contributor.author | Choi, Duk In | ko |
| dc.date.accessioned | 2013-03-03T14:27:13Z | - |
| dc.date.available | 2013-03-03T14:27:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-07 | - |
| dc.identifier.citation | JOURNAL OF COMPUTATIONAL PHYSICS, v.170, no.2, pp.550 - 561 | - |
| dc.identifier.issn | 0021-9991 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/79074 | - |
| dc.description.abstract | A new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge is suggested. The physical origin of restriction on simulation time step is discussed and a new method to overcome it is explained. To compare the new method with previous other methods, a one-dimensional fluid simulation of inductively coupled plasma discharge is performed. (C) 2000 Academic Press. | - |
| dc.language | English | - |
| dc.publisher | Academic Press Inc Elsevier Science | - |
| dc.subject | RF GLOW-DISCHARGES | - |
| dc.subject | MODEL | - |
| dc.title | A new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000169967400004 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 170 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 550 | - |
| dc.citation.endingpage | 561 | - |
| dc.citation.publicationname | JOURNAL OF COMPUTATIONAL PHYSICS | - |
| dc.identifier.doi | 10.1006/jcph.2001.6748 | - |
| dc.contributor.nonIdAuthor | Choe, HH | - |
| dc.contributor.nonIdAuthor | Yoon, NS | - |
| dc.contributor.nonIdAuthor | Kim, SS | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordAuthor | fluid | - |
| dc.subject.keywordAuthor | simulation | - |
| dc.subject.keywordAuthor | perturbation | - |
| dc.subject.keywordAuthor | numerical method | - |
| dc.subject.keywordPlus | RF GLOW-DISCHARGES | - |
| dc.subject.keywordPlus | MODEL | - |
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