A new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge

Cited 0 time in webofscience Cited 23 time in scopus
  • Hit : 402
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorChoe, HHko
dc.contributor.authorYoon, NSko
dc.contributor.authorKim, SSko
dc.contributor.authorChoi, Duk Inko
dc.date.accessioned2013-03-03T14:27:13Z-
dc.date.available2013-03-03T14:27:13Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-07-
dc.identifier.citationJOURNAL OF COMPUTATIONAL PHYSICS, v.170, no.2, pp.550 - 561-
dc.identifier.issn0021-9991-
dc.identifier.urihttp://hdl.handle.net/10203/79074-
dc.description.abstractA new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge is suggested. The physical origin of restriction on simulation time step is discussed and a new method to overcome it is explained. To compare the new method with previous other methods, a one-dimensional fluid simulation of inductively coupled plasma discharge is performed. (C) 2000 Academic Press.-
dc.languageEnglish-
dc.publisherAcademic Press Inc Elsevier Science-
dc.subjectRF GLOW-DISCHARGES-
dc.subjectMODEL-
dc.titleA new unconditionally stable algorithm for steady-state fluid simulation of high density plasma discharge-
dc.typeArticle-
dc.identifier.wosid000169967400004-
dc.type.rimsART-
dc.citation.volume170-
dc.citation.issue2-
dc.citation.beginningpage550-
dc.citation.endingpage561-
dc.citation.publicationnameJOURNAL OF COMPUTATIONAL PHYSICS-
dc.identifier.doi10.1006/jcph.2001.6748-
dc.contributor.nonIdAuthorChoe, HH-
dc.contributor.nonIdAuthorYoon, NS-
dc.contributor.nonIdAuthorKim, SS-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorfluid-
dc.subject.keywordAuthorsimulation-
dc.subject.keywordAuthorperturbation-
dc.subject.keywordAuthornumerical method-
dc.subject.keywordPlusRF GLOW-DISCHARGES-
dc.subject.keywordPlusMODEL-
Appears in Collection
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0