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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Journal Papers(저널논문)

Optical characterization of high speed scanning micromirrors with vertical combdrives

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dc.contributor.authorWada, Hko
dc.contributor.authorLee, Dko
dc.contributor.authorYu, Kyoungsikko
dc.contributor.authorKrishnamoorthy, Uko
dc.contributor.authorSolgaard, Oko
dc.date.accessioned2013-03-03T13:06:32Z-
dc.date.available2013-03-03T13:06:32Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2002-10-
dc.identifier.citationJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.41, no.10B, pp.1169 - 1171-
dc.identifier.issn0021-4922-
dc.identifier.urihttp://hdl.handle.net/10203/78786-
dc.description.abstractWe measured the resonant frequency and optical scan angle of 200 mum by 200mum scanning micromirrors actuated by vertical combdrives. The prototype devices were fabricated by our 3-level micro-electro-mechanical-systems (MEMS) process, which is based on two bond-and-etch fabrication steps. The optical scan angle of the device with the highest spring constant vas 1.4 degrees at its 43.34 kHz resonance frequency when actuated by a voltage of 78 VAC.-
dc.languageEnglish-
dc.publisherINST PURE APPLIED PHYSICS-
dc.titleOptical characterization of high speed scanning micromirrors with vertical combdrives-
dc.typeArticle-
dc.identifier.wosid000179893900014-
dc.identifier.scopusid2-s2.0-0037110147-
dc.type.rimsART-
dc.citation.volume41-
dc.citation.issue10B-
dc.citation.beginningpage1169-
dc.citation.endingpage1171-
dc.citation.publicationnameJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS-
dc.identifier.doi10.1143/JJAP.41.L1169-
dc.contributor.localauthorYu, Kyoungsik-
dc.contributor.nonIdAuthorWada, H-
dc.contributor.nonIdAuthorLee, D-
dc.contributor.nonIdAuthorKrishnamoorthy, U-
dc.contributor.nonIdAuthorSolgaard, O-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorMEMS-
dc.subject.keywordAuthormicromachine-
dc.subject.keywordAuthorscanning mirror-
dc.subject.keywordAuthormicromirror-
dc.subject.keywordAuthorcombdrive-
dc.subject.keywordAuthorcharacterization-
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EE-Journal Papers(저널논문)
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