DC Field | Value | Language |
---|---|---|
dc.contributor.author | Wada, H | ko |
dc.contributor.author | Lee, D | ko |
dc.contributor.author | Yu, Kyoungsik | ko |
dc.contributor.author | Krishnamoorthy, U | ko |
dc.contributor.author | Solgaard, O | ko |
dc.date.accessioned | 2013-03-03T13:06:32Z | - |
dc.date.available | 2013-03-03T13:06:32Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-10 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.41, no.10B, pp.1169 - 1171 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/78786 | - |
dc.description.abstract | We measured the resonant frequency and optical scan angle of 200 mum by 200mum scanning micromirrors actuated by vertical combdrives. The prototype devices were fabricated by our 3-level micro-electro-mechanical-systems (MEMS) process, which is based on two bond-and-etch fabrication steps. The optical scan angle of the device with the highest spring constant vas 1.4 degrees at its 43.34 kHz resonance frequency when actuated by a voltage of 78 VAC. | - |
dc.language | English | - |
dc.publisher | INST PURE APPLIED PHYSICS | - |
dc.title | Optical characterization of high speed scanning micromirrors with vertical combdrives | - |
dc.type | Article | - |
dc.identifier.wosid | 000179893900014 | - |
dc.identifier.scopusid | 2-s2.0-0037110147 | - |
dc.type.rims | ART | - |
dc.citation.volume | 41 | - |
dc.citation.issue | 10B | - |
dc.citation.beginningpage | 1169 | - |
dc.citation.endingpage | 1171 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | - |
dc.identifier.doi | 10.1143/JJAP.41.L1169 | - |
dc.contributor.localauthor | Yu, Kyoungsik | - |
dc.contributor.nonIdAuthor | Wada, H | - |
dc.contributor.nonIdAuthor | Lee, D | - |
dc.contributor.nonIdAuthor | Krishnamoorthy, U | - |
dc.contributor.nonIdAuthor | Solgaard, O | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | micromachine | - |
dc.subject.keywordAuthor | scanning mirror | - |
dc.subject.keywordAuthor | micromirror | - |
dc.subject.keywordAuthor | combdrive | - |
dc.subject.keywordAuthor | characterization | - |
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