Study of solid-state reaction of CaCO3 and RuO2 and fabrication of pseudocubic epitaxial thin films by e-beam evaporation

Abstract

CaRuO3 powders were prepared from solid-state reaction using stoichiometric RuO2 (99.9%) and CaCo3 (99.99%.) powders. The process of the reaction was investigated employing thermogravimetry analysis and differential scanning calorimetry (TGA and DSC). The solid-state reaction rate increased when the compounds were heated in flowing air/oxygen. as it acted as a catalyst The phase variations in samples heated at different temperatures were analyzed by X-ray diffraction (XRD) and the alignments of the films studied by XRD-rocking curves and pole-figures. The microstructures of powders were measured by Scanning electron microscopy. Biaxially, textured CaRuO3 thin films were formed at 700 Cdegrees by e-beam evaporation, and they showed strong (001) orientation on SrTiO3 (100) substrates. (C) 2004 Elsevier B.V. All rights reserved.