Lateral-shearing interferometer using square prisms for optical testing of aspheric lenses

Abstract

We present a lateral-shearing interferometer specially devised for production-line inspection of aspheric lenses. The interferometer constitutes four right-angle prisms, whose relative sliding motions provide the lateral shearing and phase shifts necessary for measuring the beam wavefront collimated by the lens under test. The prisms are held together face to face using index-matching oil, so environmental disturbances from external vibration and atmospheric turbulence can be minimized. Furthermore, a special phase-measuring algorithm of least-squares type is adopted to compensate for the phase shift error caused by the variation in thickness of the index-matching oil holding the prisms. Experimental results prove that the interferometer provides a measuring reproducibility of the order of one hundredth of the light's wavelength.