A new 3-DOF Z-tilts micropositioning system using electromagnetic actuators and air bearings

Cited 44 time in webofscience Cited 52 time in scopus
  • Hit : 323
  • Download : 0
A new 3-DOF Z-tilts (z, pitch, and roll motion) micropositioning system has been developed. It uses electromagnetic actuators and air bearings. An electromagnetic actuator produces an attraction force between the air bearing and the base plate. An air bearing has the role of suspension and guidance, with a clearance of several tens of micrometers in the z-direction. Therefore, this system has design features of guiding 3-DOF XY theta motion without limiting the plane motion and playing the role of a z-directional position actuator. With the control of current, the equilibrium position between magnetic attraction force and air bearing thrust force can be controlled with inherently infinite resolutions. The theoretical background of an electromagnetic actuator is explained. Then, an air bearing is analyzed in the point of z-directional positioning mechanism. The air bearing can be modeled as a second-order system with parameter variation-stiffness and damping vary with respect to the z-directional displacement. Therefore, a simple robust control algorithm is applied to improve the control performance. With the aid of robust control, this system provides 25 nm positioning resolution over the total range of 40 mu m along the z-direction and, accordingly, 0.29 mu rad resolution over the total range of 460 mu rad in pitch and roll motion. (C) 2000 Elsevier Science Inc. All rights reserved.
Publisher
ELSEVIER SCIENCE INC
Issue Date
2000
Language
English
Article Type
Article
Citation

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, v.24, no.1, pp.24 - 31

ISSN
0141-6359
DOI
10.1016/S0141-6359(99)00022-7
URI
http://hdl.handle.net/10203/76922
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 44 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0