DC Field | Value | Language |
---|---|---|
dc.contributor.author | 오종현 | ko |
dc.contributor.author | 오동영 | ko |
dc.contributor.author | 이승섭 | ko |
dc.date.accessioned | 2013-03-03T03:07:14Z | - |
dc.date.available | 2013-03-03T03:07:14Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000-08 | - |
dc.identifier.citation | 한국정밀공학회지, v.17, no.8, pp.120 - 125 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/76908 | - |
dc.description.abstract | This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.o and -50.o with the accuracy of 2.o. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop | - |
dc.language | Korean | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | MEMS기술을 이용한 수은방울경사각센서 개발 | - |
dc.title.alternative | Micromachined Mercury Drop Tilt Sensor | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.issue | 8 | - |
dc.citation.beginningpage | 120 | - |
dc.citation.endingpage | 125 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.contributor.localauthor | 이승섭 | - |
dc.contributor.nonIdAuthor | 오종현 | - |
dc.contributor.nonIdAuthor | 오동영 | - |
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