MEMS기술을 이용한 수은방울경사각센서 개발

Abstract

This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.o and -50.o with the accuracy of 2.o. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop