DC Field | Value | Language |
---|---|---|
dc.contributor.author | 고종수 | ko |
dc.contributor.author | 조영호 | ko |
dc.contributor.author | 곽병만 | ko |
dc.contributor.author | 박관흠 | ko |
dc.date.accessioned | 2013-03-03T01:33:06Z | - |
dc.date.available | 2013-03-03T01:33:06Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-02 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.20, no.2, pp.408 - 413 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/76508 | - |
dc.description.abstract | A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over ±50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험 | - |
dc.title.alternative | Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 408 | - |
dc.citation.endingpage | 413 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.contributor.localauthor | 조영호 | - |
dc.contributor.localauthor | 곽병만 | - |
dc.contributor.nonIdAuthor | 고종수 | - |
dc.contributor.nonIdAuthor | 박관흠 | - |
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