에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험Design, Fabricaiton and Testing of a Piezoresistive Cantilever-Beam Microaccelerometer for Automotive Airbag Applications

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A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over ±50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.
Publisher
대한기계학회
Issue Date
1996-02
Language
Korean
Citation

대한기계학회논문집 A, v.20, no.2, pp.408 - 413

ISSN
1226-4873
URI
http://hdl.handle.net/10203/76508
Appears in Collection
BiS-Journal Papers(저널논문)ME-Journal Papers(저널논문)
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