DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Kim, BK | ko |
dc.contributor.author | Han, CH | ko |
dc.contributor.author | Yoon, ES | ko |
dc.contributor.author | Kim, CK | ko |
dc.date.accessioned | 2013-03-03T00:26:16Z | - |
dc.date.available | 2013-03-03T00:26:16Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-09 | - |
dc.identifier.citation | IEEE ELECTRON DEVICE LETTERS, v.20, no.9, pp.487 - 489 | - |
dc.identifier.issn | 0741-3106 | - |
dc.identifier.uri | http://hdl.handle.net/10203/76239 | - |
dc.description.abstract | RF performance of surface micromachined solenoid on-chip inductors fabricated on a standard silicon substrate (10 Omega. cm) has been investigated and the results are compared with the same inductors on glass, The solenoid inductor on Si with a 15-mu m thick insulating layer achieves peak quality (Q-) factor of 16.7 at 2.4 GHz with inductance of 2.67 nH, This peak Q-factor is about two-thirds of that of the same inductor fabricated on glass. The highest performance has been obtained from the narrowest-pitched on-glass inductor, which shows inductance of 2.3 nH, peak Q-factor of 25.1 at 8.4 GHz, and spatial inductance density of 30 nH/mm(2), Both on-Si and on-glass inductors have been modeled by lumped circuits, and the geometrical dependence of the inductance and Q-factor have been investigated as well. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | SILICON | - |
dc.title | Surface micromachined solenoid on-Si and on-glass inductors for RF applications | - |
dc.type | Article | - |
dc.identifier.wosid | 000082301800016 | - |
dc.identifier.scopusid | 2-s2.0-0032595840 | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 9 | - |
dc.citation.beginningpage | 487 | - |
dc.citation.endingpage | 489 | - |
dc.citation.publicationname | IEEE ELECTRON DEVICE LETTERS | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Kim, BK | - |
dc.contributor.nonIdAuthor | Han, CH | - |
dc.contributor.nonIdAuthor | Yoon, ES | - |
dc.contributor.nonIdAuthor | Kim, CK | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | high Q | - |
dc.subject.keywordAuthor | integrated inductor | - |
dc.subject.keywordAuthor | micromachining | - |
dc.subject.keywordAuthor | on-chip solenoid inductor | - |
dc.subject.keywordAuthor | RF MEMS | - |
dc.subject.keywordPlus | SILICON | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.