1.54 mu m Er3+ photoluminescent and waveguiding properties of erbium-doped silicon-rich silicon oxide

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dc.contributor.authorHan, HSko
dc.contributor.authorSeo, SYko
dc.contributor.authorShin, JungHoonko
dc.contributor.authorKim, DSko
dc.date.accessioned2013-03-02T23:27:51Z-
dc.date.available2013-03-02T23:27:51Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2000-08-
dc.identifier.citationJOURNAL OF APPLIED PHYSICS, v.88, no.4, pp.2160 - 2162-
dc.identifier.issn0021-8979-
dc.identifier.urihttp://hdl.handle.net/10203/76010-
dc.description.abstract1.54 mu m Er3+ photoluminescent and waveguiding properties of erbium-doped silicon-rich silicon oxide (SRSO) are investigated. Optimum Er3+ luminescence was obtained after an anneal of at least 5 min at 950 degrees C, and at least 1 at. % excess silicon in SRSO was necessary for the excitation of erbium to be dominated by carriers. The refractive index and the bulk waveguide loss of erbium-doped SRSO film with 0.1 at. % erbium and 1 at. % excess silicon after the optimal anneal treatment was 1.4817 and 4.0 dB/cm, respectively. Fabrication of an erbium-doped SRSO strip waveguide using the standard Si processing techniques and the guiding of internal 1.54 mu m Er3+ emission by such a strip waveguide are demonstrated. (C) 2000 American Institute of Physics. [S0021-8979(00)01215-9].-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectSI NANOCRYSTALS-
dc.subjectLUMINESCENCE-
dc.subjectSIO2-FILMS-
dc.subjectEXCITATION-
dc.subjectFILMS-
dc.title1.54 mu m Er3+ photoluminescent and waveguiding properties of erbium-doped silicon-rich silicon oxide-
dc.typeArticle-
dc.identifier.wosid000088783800075-
dc.identifier.scopusid2-s2.0-0000654938-
dc.type.rimsART-
dc.citation.volume88-
dc.citation.issue4-
dc.citation.beginningpage2160-
dc.citation.endingpage2162-
dc.citation.publicationnameJOURNAL OF APPLIED PHYSICS-
dc.contributor.localauthorShin, JungHoon-
dc.contributor.nonIdAuthorHan, HS-
dc.contributor.nonIdAuthorSeo, SY-
dc.contributor.nonIdAuthorKim, DS-
dc.type.journalArticleArticle-
dc.subject.keywordPlusSI NANOCRYSTALS-
dc.subject.keywordPlusLUMINESCENCE-
dc.subject.keywordPlusSIO2-FILMS-
dc.subject.keywordPlusEXCITATION-
dc.subject.keywordPlusFILMS-
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