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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

RF Planar Magnetron Sputtering을 이용한 탄성파 소자용 ZnO 압전 박막 제작

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김종완 / 한봉명 / 박희태 / 김경식 / 김수용researcher
Publisher
한국물리학회
Issue Date
1995-03
Language
Korean
Citation

새물리, v.8, no.2, pp.177 - 181

ISSN
0374-4914
URI
http://hdl.handle.net/10203/74569
Appears in Collection
PH-Journal Papers(저널논문)
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