DC Field | Value | Language |
---|---|---|
dc.contributor.author | Sun, D.-S. | - |
dc.contributor.author | Park, N.-S. | - |
dc.contributor.author | Lee, Y.-J. | - |
dc.contributor.author | Jang, Y.-C. | - |
dc.contributor.author | Ahn, C.-S. | - |
dc.contributor.author | Lee, Tae-Eog | - |
dc.date.accessioned | 2008-09-22T09:32:35Z | - |
dc.date.available | 2008-09-22T09:32:35Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-04-11 | - |
dc.identifier.citation | 2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence, v., no., pp.270 - 274 | - |
dc.identifier.issn | 1078-8743 | - |
dc.identifier.uri | http://hdl.handle.net/10203/7391 | - |
dc.language | ENG | - |
dc.language.iso | en_US | en |
dc.publisher | IEEE/SEMI | - |
dc.title | Integration of lot dispatching and AMHS control in a 300mm wafer FAB | - |
dc.type | Conference | - |
dc.identifier.scopusid | 2-s2.0-27644448808 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 270 | - |
dc.citation.endingpage | 274 | - |
dc.citation.publicationname | 2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence | - |
dc.identifier.conferencecountry | Germany | - |
dc.identifier.conferencecountry | Germany | - |
dc.contributor.localauthor | Lee, Tae-Eog | - |
dc.contributor.nonIdAuthor | Sun, D.-S. | - |
dc.contributor.nonIdAuthor | Park, N.-S. | - |
dc.contributor.nonIdAuthor | Lee, Y.-J. | - |
dc.contributor.nonIdAuthor | Jang, Y.-C. | - |
dc.contributor.nonIdAuthor | Ahn, C.-S. | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.