DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Tae-Eog | ko |
dc.contributor.author | Lee, J.-H. | ko |
dc.date.accessioned | 2008-09-22T09:32:23Z | - |
dc.date.available | 2008-09-22T09:32:23Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2001-10-15 | - |
dc.identifier.citation | 8th International Conference on Emerging Technologies and Factory Automation (ETFA 2001), pp.775 - 778 | - |
dc.identifier.uri | http://hdl.handle.net/10203/7390 | - |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | IEEE | - |
dc.title | An integrated application framework for a cluster tool controller for semiconductor manufacturing | - |
dc.type | Conference | - |
dc.identifier.wosid | 000176706000116 | - |
dc.identifier.scopusid | 2-s2.0-0035556986 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 775 | - |
dc.citation.endingpage | 778 | - |
dc.citation.publicationname | 8th International Conference on Emerging Technologies and Factory Automation (ETFA 2001) | - |
dc.identifier.conferencecountry | FR | - |
dc.identifier.conferencelocation | Antibes-Juan les pins | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Lee, Tae-Eog | - |
dc.contributor.nonIdAuthor | Lee, J.-H. | - |
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