Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Nam, Choong-Mo | ko |
| dc.contributor.author | Kwon, Young-Se | ko |
| dc.date.accessioned | 2013-03-02T12:16:24Z | - |
| dc.date.available | 2013-03-02T12:16:24Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-11 | - |
| dc.identifier.citation | IEEE Microwave and Guided Wave Letters, v.8, no.11, pp.369 - 371 | - |
| dc.identifier.issn | 1051-8207 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73473 | - |
| dc.description.abstract | The problem of high dielectric loss of waveguide on silicon in the microwave region can be solved by utilizing a thick silicon dioxide layer that is formed by silicon substrate anodization and oxidation processes. Coplanar waveguides (CPW's) are fabricated on silicon substrate with a 20-mu m-thick oxidized porous silicon (OPS) layer and demonstrate very high performance of 0.1-dB/mm attenuation at 4 GHz, Thus, the OPS process is promising for gigaherz applications of silicon substrates. | - |
| dc.language | English | - |
| dc.publisher | Institute of Electrical and Electronics Engineers | - |
| dc.title | Coplanar waveguides on silicon substrate with thick oxidized porous silicon (OPS) layer | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000077702100005 | - |
| dc.identifier.scopusid | 2-s2.0-0032207114 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 8 | - |
| dc.citation.issue | 11 | - |
| dc.citation.beginningpage | 369 | - |
| dc.citation.endingpage | 371 | - |
| dc.citation.publicationname | IEEE Microwave and Guided Wave Letters | - |
| dc.identifier.doi | 10.1109/75.736246 | - |
| dc.contributor.localauthor | Kwon, Young-Se | - |
| dc.contributor.nonIdAuthor | Nam, Choong-Mo | - |
| dc.description.isOpenAccess | N | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordAuthor | coplanar waveguide (CPW) | - |
| dc.subject.keywordAuthor | oxidized porous silicon (OPS) | - |
| dc.subject.keywordAuthor | silicon substrate | - |
| dc.subject.keywordPlus | PERFORMANCE | - |
- Appears in Collection
- EE-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
This item is cited by other documents in WoS
| ⊙ Detail Information in WoSⓡ | Click to see |  |
| ⊙ Cited 32 items in WoS | Click to see citing articles in |  |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.