DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, BG | ko |
dc.contributor.author | Kang, SY | ko |
dc.contributor.author | Kim, Jong Jean | ko |
dc.date.accessioned | 2013-02-28T03:15:49Z | - |
dc.date.available | 2013-02-28T03:15:49Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1997-06 | - |
dc.identifier.citation | JOURNAL OF PHYSICS D-APPLIED PHYSICS, v.30, no.12, pp.1720 - 1724 | - |
dc.identifier.issn | 0022-3727 | - |
dc.identifier.uri | http://hdl.handle.net/10203/72478 | - |
dc.description.abstract | Fluorinated silicon oxide (SiOF) films were prepared by plasma enhanced chemical vapour deposition (PECVD) and studied by FTIR spectroscopic measurements. As fluorination dosage increased, the band intensity of the SI-F stretching mode was observed to increase but the peak frequency and band width remained unchanged. The Si-O vibrational bands were found to increase in frequency and decrease in band width. The Si-O asymmetric stretching band was analysed. It was found that the average bond angle of Si-O-Si bond increased but the distribution of the bond angles decreased in width as fluorination dosage was increased. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | INFRARED-ABSORPTION | - |
dc.subject | VIBRATIONAL-SPECTRA | - |
dc.subject | DIOXIDE FILMS | - |
dc.subject | DISORDER | - |
dc.subject | GLASSES | - |
dc.subject | MODE | - |
dc.subject | SPECTROSCOPY | - |
dc.subject | SIO2 | - |
dc.title | FTIR study of fluorinated silicon oxide film | - |
dc.type | Article | - |
dc.identifier.wosid | A1997XH16000005 | - |
dc.identifier.scopusid | 2-s2.0-0031166522 | - |
dc.type.rims | ART | - |
dc.citation.volume | 30 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 1720 | - |
dc.citation.endingpage | 1724 | - |
dc.citation.publicationname | JOURNAL OF PHYSICS D-APPLIED PHYSICS | - |
dc.identifier.doi | 10.1088/0022-3727/30/12/005 | - |
dc.contributor.nonIdAuthor | Kim, BG | - |
dc.contributor.nonIdAuthor | Kang, SY | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
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