Two-dimensional electron heating theory of inductively coupled discharge

Abstract

A two-dimensional electron heating theory of inductively coupled plasma(ICP) discharge is developed. The theory includes the collisionless heating mechanism and the finite size effect of reactor. The electromagnetic fields are calculated by solving the Maxwell-Boltzmann equations with appropriate boundary conditions and the impedance of the plasma is determined from the obtained field-quantities. A circuit model including impedance matching network can be then developed and the self-consistent plasma heating model is available.