실리콘 식각 공정시 발생하는 격자결함 관찰 및 제거동향 연구Lattice Damage Produced during Silicon Etch Process and Its Recovery Phenomena
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 원대희 | ko |
| dc.contributor.author | 이주훈 | ko |
| dc.contributor.author | 김지형 | ko |
| dc.contributor.author | 염근영 | ko |
| dc.contributor.author | 이주욱 | ko |
| dc.contributor.author | 이정용 | ko |
| dc.date.accessioned | 2013-02-27T19:19:02Z | - |
| dc.date.available | 2013-02-27T19:19:02Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1996-12 | - |
| dc.identifier.citation | 한국재료학회지, v.6, no.5, pp.524 - 531 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/70348 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | 실리콘 식각 공정시 발생하는 격자결함 관찰 및 제거동향 연구 | - |
| dc.title.alternative | Lattice Damage Produced during Silicon Etch Process and Its Recovery Phenomena | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 6 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 524 | - |
| dc.citation.endingpage | 531 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.contributor.localauthor | 이정용 | - |
| dc.contributor.nonIdAuthor | 원대희 | - |
| dc.contributor.nonIdAuthor | 이주훈 | - |
| dc.contributor.nonIdAuthor | 김지형 | - |
| dc.contributor.nonIdAuthor | 염근영 | - |
| dc.contributor.nonIdAuthor | 이주욱 | - |
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