DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조영호 | ko |
dc.date.accessioned | 2013-02-27T19:13:47Z | - |
dc.date.available | 2013-02-27T19:13:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-05 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.20, no.5, pp.1363 - 1371 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/70315 | - |
dc.description.abstract | This paper presents the design, fabrication, and testing of polysilicon electrostatic microactuators that resonate in the direction parallel to the silicon susbstrates. A set of six different designs has been developed using a theoretical model and design formulae developed for the mocroactuators. Microactuator prototypes are fabricated from a 2.1 $\mu{m}$-thick LPCVD polysilicon film, using a 4-mask surface-micromachining process. The prototypes are tested under a d.c. bias voltage of 45V with an a.c. drive voltage amplitude of 20 v.Measured resorant frequencies are in the ranges of 40-60 kHz, showing a good agreement to their theoretical estimates within error bounds of .±.5%. Important issues inthe design and microfabrication of the microactuators are discussed, together with potential applicaitons of the key technology involved. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 수평공진형 다결정 실리콘 미소액추에이터의 설계, 제작 및 시험 | - |
dc.title.alternative | Design, Microfabricaiton and Testing of Laterally-Resonating Polysilicon Microactuators | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 5 | - |
dc.citation.beginningpage | 1363 | - |
dc.citation.endingpage | 1371 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.contributor.localauthor | 조영호 | - |
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