횡방향 주사를 이용한 광위상 간섭계의 페이즈 언래핑 향상에 대한 연구

Abstract

The biggest problem common on to all forms of Phase Shift Interferometer is unwrapping the phase. Simple phase unwrapping algorithms assume that every pixel is within radians of its neighbors. If this is true, any reasonable algorithm will return the correct unwrapped phase. If not, correct unwrapped phase will not be obtained. In rough surface, frequently, neighboring pixels have phase steps greater than. This paper proposes the new method which makes phase steps smaller than by sub-pixel movement.