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Theoretical composition calibration and thickness measurement in the analysis of multielement thin films using wavelength dispersive spectroscopy: application to PZT thin films Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS, v.36, no.0, pp.1242 - 1245, 1997-04 |
Theoretical Composition Calibration and Thickness Measurement in the Analysis of Multielement Thin Films Using Wavelength Dispersive Spectroscopy: Applications to Lead Zirconate Titanate Thin Films Byun, Kyung-Mun; Kim, Jae-Whan; Lee, Won-Jong, Japanese Journal of Applied Physics, Vol.36, pp.L1242-L1245, 1997-09-15 |
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