Showing results 5 to 7 of 7
Investigation into Development of Manufacture Process for Repetitive High Aspect Ratio Microstructures using Photosensitive Paste = 감광성 페이스트를 이용한 고종횡비 마이크로 반복구조물의 제작공정 개발에 관한 연구link Ryu, Seung-Min; 류승민; et al, 한국과학기술원, 2010 |
Reliability of thin gate oxides irradiated under X-ray lithography conditions Cho, Byung Jin; Kim, SJ; Ang, CH; Ling, CH; Joo, MS; Yeo, IS, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.40, no.4B, pp.2819 - 2822, 2001-04 |
제조공정과 사용조건을 고려한 X-선 마스크의 변형해석 = Analysis of structural distortions of an X-ray mask considering fabrication processes and writing conditionslink 김일용; Kim, Il-Yong; et al, 한국과학기술원, 1997 |
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