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Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module Kim, Dae-Kyu; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.55, no.11, pp.3092 - 3109, 2017-07 |
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers Kim, Dae-Kyu; Lee, Tae-Eog; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1165 - 1175, 2016-04 |
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