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Distortion Analysis of Periodic Ring Patterns Fabrication Using Surface Plasmon Interference Lithography With an Al Hexagonal Grating Structure on Glass Kim, Yong Min; Choi, Kyung Cheol, IEEE TRANSACTIONS ON NANOTECHNOLOGY, v.17, no.3, pp.432 - 436, 2018-05 |
Electrochemically Enhanced Wet Cleaning of Ru Capping Thin Film for EUV Lithography Reflector Seo, H; Park, JeongYoung; Liang, T; Somorjai, GA, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.157, no.4, pp.414 - 419, 2010 |
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