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Showing results 79 to 79 of 79

79
염소계 플라즈마를 이용한 구리박막의 건식 식각기구에 관한 연구 = A study on the dry etching mechanism of copper film in chlorine-based plasmalink

이성권; Lee, Sung-Kwon; et al, 한국과학기술원, 1997

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