The radio frequency magnetic field effect on electron heating in a low frequency inductively coupled plasma

Abstract

Radio frequency power with a low frequency of 4 MHz is delivered to a solenoidal inductively coupled plasma at a low pressure of 1 mTorr. The electron energy distribution functions (EEDFs) are measured by a rf compensated Langmuir probe at different rf powers. As the rf power increases, a Maxwellian EEDF evolves into a bi-Maxwellian EEDF with a low energy peak. This means that the electron heating in the plasma greatly changes. This EEDF transition can be understood by considering the rf magnetic field effect, which is strong at low frequency. (C) 2000 American Institute of Physics. [S1070-664X(00)00409-2].