Three types of organic-inorganic hybrid materials were prepared by the sol-gel processable monomers derived from 3-isocyanatopropyltriethoxysilane with three different hydroxy-functionalized nonlinear optical chromophores. The measured values of NLO coefficient strongly depended on conditions such as poling temperature, poling time and heating rate. The hybrid films heated at 200 degreesC exhibited d(33) = 50-58 pm/V in Maker-fringe measurement. It was found that the thermal stabilities of the films were greatly enhanced as poling time increased and a poling temperature became higher. Also, we observed good waveguiding properties of the films at 810 nm and 1063 nm. The optical propagation losses of the films for TE mode were about 2 dB/cm at 810 nm and 0.5 dB/cm at 1064 nm.