Growth and characterization of diamond-like carbon films by pulsed laser deposition and hydrogen beam treatment

Cited 10 time in webofscience Cited 12 time in scopus
  • Hit : 280
  • Download : 0
Amorphous diamond-like carbon films have been grown by pulsed laser deposition using a graphite target both with and without an atomic hydrogen beam incident on the growing film. Films grown with the hydrogen beam showed resistivity nearly two orders of magnitude higher than the films grown without hydrogen. Raman scattering confirmed a higher degree of sp(3) bonding in films exposed to hydrogen atoms during growth. Films grown without hydrogen but exposed to the hydrogen beam after growth showed a significant increase in resistivity after exposure. (C) 1998 Elsevier Science S.A. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
1998-12
Language
English
Article Type
Article
Keywords

AMORPHOUS-CARBON; RAMAN-SPECTRA; GRAPHITE

Citation

THIN SOLID FILMS, v.335, no.1-2, pp.27 - 31

ISSN
0040-6090
DOI
10.1016/S0040-6090(98)00867-0
URI
http://hdl.handle.net/10203/68687
Appears in Collection
CH-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 10 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0