병렬 안테나에 따른 플라즈마원의 균일도 연구Study on the Uniformity of Plasma Density at TCP Using Parallel Antennas
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Geun-Hee Bai | ko |
| dc.contributor.author | Sang-Hun Seo | ko |
| dc.contributor.author | Hong-Young Chang | ko |
| dc.date.accessioned | 2013-02-27T12:13:01Z | - |
| dc.date.available | 2013-02-27T12:13:01Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01 | - |
| dc.identifier.citation | 한국진공학회지, v.7, no.3, pp.273 - 276 | - |
| dc.identifier.issn | 1225-8822 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/68499 | - |
| dc.language | Korean | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | 병렬 안테나에 따른 플라즈마원의 균일도 연구 | - |
| dc.title.alternative | Study on the Uniformity of Plasma Density at TCP Using Parallel Antennas | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 7 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 273 | - |
| dc.citation.endingpage | 276 | - |
| dc.citation.publicationname | 한국진공학회지 | - |
| dc.contributor.localauthor | Hong-Young Chang | - |
| dc.contributor.nonIdAuthor | Geun-Hee Bai | - |
| dc.contributor.nonIdAuthor | Sang-Hun Seo | - |
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