ECR PECVD법으로 증착된 lead titanate박막의 조성과 미세구조에 대한 증착변수의 영향The Effects of Process Parameters on the Composition and Microstructure of Lead Titanate Thin Films deposited by ECR PECVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정수옥 | ko |
| dc.contributor.author | 정성웅 | ko |
| dc.contributor.author | 이원종 | ko |
| dc.date.accessioned | 2013-02-27T11:11:53Z | - |
| dc.date.available | 2013-02-27T11:11:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1997-04 | - |
| dc.identifier.citation | 한국재료학회지, v.7, no.2, pp.93 - 101 | - |
| dc.identifier.issn | 1225-0562 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/68167 | - |
| dc.language | Korean | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | ECR PECVD법으로 증착된 lead titanate박막의 조성과 미세구조에 대한 증착변수의 영향 | - |
| dc.title.alternative | The Effects of Process Parameters on the Composition and Microstructure of Lead Titanate Thin Films deposited by ECR PECVD | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 7 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 93 | - |
| dc.citation.endingpage | 101 | - |
| dc.citation.publicationname | 한국재료학회지 | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.nonIdAuthor | 정수옥 | - |
| dc.contributor.nonIdAuthor | 정성웅 | - |
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